1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

ASMC 98 proceedings : theme - Semiconductor manufacturing: meeting the challenges of the global marketplace : September 23-25, 1998, Boston, Massachusetts, USA

Verfasser / Beitragende:
Institute of Electrical and Electronics Engineers; Semiconductor Equipment and Materials Institute
Ort, Verlag, Jahr:
Piscataway, NJ : IEEE, 1998
Beschreibung:
VI, 482 S. : Ill. ; 29 cm
Format:
Buch (Kongress)
ID: 143942182