Papers from the 11th International Vacuum Microelectronics Conference

Verfasser / Beitragende:
[ed.: Dorota Temple]. Papers from the Fourth International Plasma-Based Ion Implantation Workshop / ed.: Joseph V. Mantese, Carlton E. Speck
Ort, Verlag, Jahr:
Woodbury, NY : American Institute of Physics, 1999
Enthalten in:
Microelectronics and nanometer structures: processing, measurement and phenomena, vol. 17, 1999 / no. 2, mar-apr, pp. 259-904
Beschreibung:
18, S. 259-903 S. : Ill.
Format:
Buch (Kongress)
ID: 143991426