Design and process integration for microelectronic manufacturing III

3-4 March 2005, San Jose, California, USA

Verfasser / Beitragende:
Lars W. Liebmann, chair/ed ; spons. and publ. by SPIE - The International Society for Optical Engineering
Ort, Verlag, Jahr:
Bellingham, Washington : SPIE, 2005
Beschreibung:
438 S. : Ill.
Format:
Buch (Kongress)
ID: 161523315