Optical microlithography XXIII

23-25 February 2010, San Jose, California, United States

Verfasser / Beitragende:
Mircea V. Dusa ... [et al.] (eds.) ; spons. by SPIE ; coop org. SEMATECH Inc. (United States) ; publ. by SPIE
Ort, Verlag, Jahr:
Bellingham, Washington : SPIE, 2010
Beschreibung:
2 parts : Ill.
Format:
Buch (Kongress)
ID: 170946819