Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VII

28 August 2013, San Diego, California, United States

Verfasser / Beitragende:
Michael T. Postek ... [et al.] eds ; spons. and publ. by SPIE
Ort, Verlag, Jahr:
Bellingham : SPIE, 2013
Beschreibung:
1 Band : Ill.
Format:
Buch (Kongress)
ID: 306064855