Implantation profiles of ³²P channelled into silicon crystals

Verfasser / Beitragende:
G. Dearnaley ... [et al.]
Ort, Verlag, Jahr:
Harwell, Berkshire : UK Atomic Energy Authority Research Group, 1967
Beschreibung:
5 S. : Ill.
Format:
Buch
ID: 328820873