cam a22 4 4500 357796845 CHVBK 20200930080358.0 160211s2014 nju |||| 100 0 eng|d 978-1-62332-208-3 soft cover 978-1-60768-565-4 PDF (OCoLC)938491361 (NEBIS)010603678 (DE-599)GBV847437159 GBVCP ger SzZuIDS NEBIS ETH-BIB rda 52.78 bcl 50.94 bcl Chemical Mechanical Polishing Veranstaltung (2014 Orlando, Fla.) (DE-588)1085183807 Chemical mechanical polishing 13 [papers ... presented in the Symposium "Chemical Mechanical Polishing 13", held during the 225th meeting of the Electrochemical Society, in Orlando, Florida, from May 11 to May 15, 2014] editors: R. Rhoades [und 4 andere] ; sponsoring division: Dielectric Science & Technology Pennington, NJ Electrochemical Soc [2014] V, 65 S. Ill., graph. Darst. Text txt rdacontent/ger ohne Hilfsmittel zu benutzen n rdamedia/ger Band nc rdacarrier/ger ECS transactions vol. 61, no. 17 61/17 Electronic materials and processing (NEBIS)005460664 165530405 Literaturangaben Chemisches Polieren (DE-588)4227250-6 gnd Polieren (DE-588)4175006-8 gnd CHEMISCH-MECHANISCHES POLIEREN (SPANENDE UMFORMUNG) ger (ETHUDK)000064735 ethudk MATERIALBEARBEITUNG (WERKSTOFFE) ger (ETHUDK)000062124 ethudk Konferenzschrift Orlando, Fla 2014 gnd-content u CHEMISCH-MECHANISCHES POLIEREN (SPANENDE UMFORMUNG) ger 621.923.81 nebis E1 u MATERIALBEARBEITUNG (WERKSTOFFE) ger 620.22,0 nebis E1 u CHEMICAL-MECHANICAL POLISHING (MACHINING) eng 621.923.81 nebis E1 u POLISSAGE MÉCANO-CHIMIQUE (USINAGE) fre 621.923.81 nebis E1 u MATERIAL PROCESSING eng 620.22,0 nebis E1 u TRAITEMENT DE MATÉRIAUX fre 620.22,0 nebis E1 Rhoades R. Herausgeber edt Electrochemical Society Dielectric Science and Technology Division (DE-588)5121104-X Sponsor spn Electrochemical Society Meeting (225. 2014 Orlando, Fla.) (DE-588)108481658X BK020800 XK020000 XK020000 160 E01-20160328 NEBIS E16 E16 RH P T 1108: 61/17 NEBIS 111 2- Chemical Mechanical Polishing Veranstaltung (2014 Orlando, Fla) (DE-588)1085183807 NEBIS 490 0- ECS transactions Electronic materials and processing vol. 61, no. 17 61/17 (NEBIS)005460664 165530405 NEBIS 700 1- Rhoades R. Herausgeber edt NEBIS 710 2- Electrochemical Society Dielectric Science and Technology Division (DE-588)5121104-X Sponsor spn NEBIS 711 2- Electrochemical Society Meeting (225 2014 Orlando, Fla) (DE-588)108481658X NEBIS EAD50 EBI01 E01 https://opac.nebis.ch/objects/pdf03/e01_978-1-62332-208-3_01.pdf Titelblatt und Inhaltsverzeichnis VIEW pdf