caa a22 4500 388018445 CHVBK 20180307124917.0 cr unu---uuuuu 161130e199811 xx s 000 0 eng 10.1557/JMR.1998.0423 doi S0884291400046574 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0423 Growth structure of yttria-stabilized-zirconia films during off-normal ion-beam-assisted deposition [Elektronische Daten] Biaxially aligned YSZ thin films with strong [100] fiber texture were formed on a polycrystalline Ni-based alloy by off-normal ion-beam-assisted deposition. Growth structures were characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), atomic force microscopy (AFM), etc., and the alignment mechanism was discussed using a selective growth model. Peculiar structural evolution of the crystalline orientation was observed and its development was well described by an exponential equation. It was explained as a collaboration of an anisotropic growth condition and epitaxial crystallization. The [100] fiber texture was formed by columnar structures of diameter of 30-100 nm, which were composed of 5-10 nm diameter crystallites. Very smooth surfaces were observed by AFM imaging with a roughness of 2-3 nm and a peculiar ripple structure. The origin of the azimuthal alignment was discussed with emphasis on the surface structure of YSZ films produced using ion-beam-assisted deposition (IBAD) and the etching rate measurements of (100) surfaces of YSZ single crystals. Copyright © Materials Research Society 1998 Iijima Y. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Hosaka M. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Tanabe N. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Sadakata N. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Saitoh T. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Kohno O. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan Takeda K. Super-GM, 5-14-10, Nishitenma, Osaka 530, Japan Journal of Materials Research Cambridge University Press 13/11(1998-11), 3106-3113 0884-2914 13:11<3106 1998 13 JMR https://doi.org/10.1557/JMR.1998.0423 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0423 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Iijima Y. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Hosaka M. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Tanabe N. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Sadakata N. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Saitoh T. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Kohno O. Materials Research Lab., Fujikura Ltd., 1-5-1, Kiba, Koto-ku, Tokyo 135, Japan NATIONALLICENCE 700 1- Takeda K. Super-GM, 5-14-10, Nishitenma, Osaka 530, Japan NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/11(1998-11), 3106-3113 0884-2914 13:11<3106 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge