caa a22 4500 388018569 CHVBK 20180307124917.0 cr unu---uuuuu 161130e199811 xx s 000 0 eng 10.1557/JMR.1998.0428 doi S0884291400046628 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0428 Growth mechanism of biaxially textured YSZ films deposited by ion-beam-assisted deposition [Elektronische Daten] Biaxially textured YSZ films have a large technical relevance for power or electronic applications of HTS films. The YSZ serves as a diffusion barrier and as a template for an epitaxial growth of the HTS. On polycrystalline substrates the biaxial alignment is achieved by using an ion-beam-assisted deposition method. The best obtained textures were characterized by a full width at half maximum of 7° in an 〈111〉 x-ray diffraction Φ scan. The FWHM decreases with increasing film thickness. The growth mechanism is investigated with respect to three important effects: nucleation, growth selection, and homoepitaxial growth. It could be shown that during nucleation at the beginning of deposition the angle between the assisting beam and the substrate normal has to be fixed at 55°, whereas during the growth selection this angle can be varied. Especially the homoepitaxial effects allow changes in the deposition conditions without destroying the already achieved texture quality. Copyright © Materials Research Society 1998 Wiesmann J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany Dzick J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany Hoffmann J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany Heinemann K. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany Freyhardt H. C. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany Journal of Materials Research Cambridge University Press 13/11(1998-11), 3149-3152 0884-2914 13:11<3149 1998 13 JMR https://doi.org/10.1557/JMR.1998.0428 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0428 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wiesmann J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany NATIONALLICENCE 700 1- Dzick J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany NATIONALLICENCE 700 1- Hoffmann J. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany NATIONALLICENCE 700 1- Heinemann K. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany NATIONALLICENCE 700 1- Freyhardt H. C. Institut für Metallphysik, Universität Göttingen, Hospitalstr. 3/7, D-37073 Göttingen, Germany NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/11(1998-11), 3149-3152 0884-2914 13:11<3149 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge