caa a22 4500 388018631 CHVBK 20180307124917.0 cr unu---uuuuu 161130e199806 xx s 000 0 eng 10.1557/JMR.1998.0222 doi S0884291400044587 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0222 Grain morphology and cation composition heterogeneity of Pb(ZrxTi1-x)O3 thin films deposited by metal-organic chemical vapor deposition [Elektronische Daten] The preferred orientation, grain morphology, and composition heterogeneity of the polycrystalline Pb(ZrxTi1-x)O3 (PZT) thin films were characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), transmission electron microscopy (TEM), and x-ray energy dispersive spectroscopy (EDS). PZT thin films with nominal x = 0.5 were grown by metal-organic chemical vapor deposition (MOCVD) on (110)- and (101)-textured RuO2 bottom electrodes at temperatures ≤525 °C. Columnar grain microstructure with strongly faceted surface morphology was observed in both films. The grain morphology and surface roughness of the PZT films were observed to depend on those of the underlying RuO2 layers. TEM-EDS analysis shows notable cation composition heterogeneity in length scales of 0.2-2 μm. Pronounced Pb composition deficiency and heterogeneity were also observed in PZT/(110)RuO2 in length scales above 40 μm. The grain morphology and cation heterogeneity of the PZT films are discussed on the basis of diffusion-limited columnar growth mechanism. Copyright © Materials Research Society 1998 Tsu I-Fei Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Bai G-R Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Foster C. M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Merkle K. L. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Liu K. C. Water Chemistry Program, University of Wisconsin-Madison, Madison, Wisconsin 53706 Journal of Materials Research Cambridge University Press 13/6(1998-06), 1614-1625 0884-2914 13:6<1614 1998 13 JMR https://doi.org/10.1557/JMR.1998.0222 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0222 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Tsu I-Fei Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Bai G-R Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Foster C. M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Merkle K. L. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Liu K. C. Water Chemistry Program, University of Wisconsin-Madison, Madison, Wisconsin 53706 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/6(1998-06), 1614-1625 0884-2914 13:6<1614 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge