caa a22 4500 388018755 CHVBK 20180307124918.0 cr unu---uuuuu 161130e199806 xx s 000 0 eng 10.1557/JMR.1998.0211 doi S0884291400044472 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0211 The use of reliability factors in analyzing powder patterns in Pt-Si sputtering targets and subsequent films [Elektronische Daten] X-ray powder diffraction was used to characterize a Pt-Si sputtering target and subsequent films. The powder patterns of each sample indicated lines due to diffraction from different phases. We have initiated a preliminary study through which we have analyzed and characterized these films. The results presented for these samples corroborate with results observed for this system in the planar configuration. Copyright © Materials Research Society 1998 Rahman Abdul Department of Physics and Astronomy, Howard University, Washington, DC 20059 Lowe Walter P. Department of Physics and Astronomy, Howard University, Washington, DC 20059 Bates Clayton W. Materials Science Research Center of Excellence, Department of Electrical Engineering, Howard University, Washington, DC 20059 Journal of Materials Research Cambridge University Press 13/6(1998-06), 1517-1521 0884-2914 13:6<1517 1998 13 JMR https://doi.org/10.1557/JMR.1998.0211 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0211 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Rahman Abdul Department of Physics and Astronomy, Howard University, Washington, DC 20059 NATIONALLICENCE 700 1- Lowe Walter P. Department of Physics and Astronomy, Howard University, Washington, DC 20059 NATIONALLICENCE 700 1- Bates Clayton W. Materials Science Research Center of Excellence, Department of Electrical Engineering, Howard University, Washington, DC 20059 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/6(1998-06), 1517-1521 0884-2914 13:6<1517 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge