caa a22 4500 38801878X CHVBK 20180307124918.0 cr unu---uuuuu 161130e199806 xx s 000 0 eng 10.1557/JMR.1998.0200 doi S0884291400044368 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0200 Preparation of wurtzitic AlN thin films with a novel crystallographic alignment on MgO substrates by molecular-beam epitaxy [Elektronische Daten] Thin films of wurtzitic AlN have been deposited by molecular-beam epitaxy onto (001) oriented MgO substrates. The films are epitactic and align with the and the , as evidenced by transmission electron microscopy. This configuration, which matches a close-packed direction of the film and substrate, allows for growth of two symmetrically equivalent orientation variants of the AlN film. These variants are distinguished by a 90° rotation about the direction that is normal to the substrate surface. Each variant also aligns the and the to within 5° of being parallel to the (200)MgO. The microstructure of the AlN films and origins of these novel alignments are discussed. Copyright © Materials Research Society 1998 Heffelfinger J. R. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 Medlin D. L. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 McCarty K. F. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 Journal of Materials Research Cambridge University Press 13/6(1998-06), 1414-1417 0884-2914 13:6<1414 1998 13 JMR https://doi.org/10.1557/JMR.1998.0200 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0200 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Heffelfinger J. R. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 NATIONALLICENCE 700 1- Medlin D. L. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 NATIONALLICENCE 700 1- McCarty K. F. Materials and Engineering Sciences Center, Sandia National Laboratories, P.O. Box 969, Livermore, California 94551 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/6(1998-06), 1414-1417 0884-2914 13:6<1414 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge