caa a22 4500 388018836 CHVBK 20180307124918.0 cr unu---uuuuu 161130e199806 xx s 000 0 eng 10.1557/JMR.1998.0239 doi S0884291400044757 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0239 Generation of microwave plasma under high pressure and fabrication of ultrafine carbon particles [Elektronische Daten] A microwave plasma generator, which functions under high pressure, has been developed and used in the fabrication of fine carbon particles. The plasma generator is a two-stage-type resonator, which consists of rectangular and semi-cylindrical-type resonators which are coupled in series for torching plasma and keeping it stable under high pressure. The plasma can be torched in helium gas at 3 × 106 Pa by tuning the dimensions of apparatus elements. Fine carbon particles of ~50 nm are obtained using a mixture of helium and methane gas. The particles are found to be crystalline from the results of transparent electron microscopy and diffraction analysis. Copyright © Materials Research Society 1998 Yagi H. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan Ide T. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan Toyota H. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan Mori Y. Department of Precision Science and Technology, Osaka University, Suita 565, Japan Journal of Materials Research Cambridge University Press 13/6(1998-06), 1724-1727 0884-2914 13:6<1724 1998 13 JMR https://doi.org/10.1557/JMR.1998.0239 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0239 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Yagi H. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan NATIONALLICENCE 700 1- Ide T. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan NATIONALLICENCE 700 1- Toyota H. Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan NATIONALLICENCE 700 1- Mori Y. Department of Precision Science and Technology, Osaka University, Suita 565, Japan NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/6(1998-06), 1724-1727 0884-2914 13:6<1724 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge