caa a22 4500 388019662 CHVBK 20180307124920.0 cr unu---uuuuu 161130e199812 xx s 000 0 eng 10.1557/JMR.1998.0454 doi S0884291400046689 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0454 Microinstruments for submicron material studies [Elektronische Daten] We present two microinstruments for submicron scale material characterization. One of the instruments applies torsion on two single crystal silicon bars with square cross sections,1 and 2.25 μm2, until fracture. The maximum shear stress prior to fracture is found tobe 5.6 and 2.6 GPa, respectively. The second instrument applies tension on a composite (aluminum-silicon dioxide) beam, 1 × 1.5 μm2 in cross section. The beam fails at 220 μN.In both the experiments, the samples are designed, patterned, and cofabricated with the instruments. The microinstruments' small size, low thermal mass, vacuum compatibility, and built-in vibration isolation allow material characterization to be performed over a wide range of environmental conditions: high vacuum (electron microscopy and surface analysis), high humidity, high pressure, and high and low temperatures. Copyright © Materials Research Society 1998 Saif M. T. A. School of Electrical Engineering and The Cornell Nanofabrication Facility, Cornell University, Phillips Hall, Ithaca, New York 14853 MacDonald N. C. School of Electrical Engineering and The Cornell Nanofabrication Facility, Cornell University, Phillips Hall, Ithaca, New York 14853 Journal of Materials Research Cambridge University Press 13/12(1998-12), 3353-3356 0884-2914 13:12<3353 1998 13 JMR https://doi.org/10.1557/JMR.1998.0454 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0454 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Saif M. T. A. School of Electrical Engineering and The Cornell Nanofabrication Facility, Cornell University, Phillips Hall, Ithaca, New York 14853 NATIONALLICENCE 700 1- MacDonald N. C. School of Electrical Engineering and The Cornell Nanofabrication Facility, Cornell University, Phillips Hall, Ithaca, New York 14853 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/12(1998-12), 3353-3356 0884-2914 13:12<3353 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge