caa a22 4500 388019700 CHVBK 20180307124920.0 cr unu---uuuuu 161130e199812 xx s 000 0 eng 10.1557/JMR.1998.0460 doi S0884291400046744 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0460 The mechanism of sputter-induced epitaxy modification in YBCO (001) films grown on MgO (001) substrates [Elektronische Daten] The sputter-induced epitaxy change of in-plane orientation occurring in YBa2Cu3O7-x (001) thin films grown on MgO (001) substrates by pulsed organo-metallic beam epitaxy (POMBE) is investigated by a series of film growth and characterization experiments, including RBS and TEM. The factors influencing the orientation change are systematically studied. The experimental results suggest that the substrate surface morphology change caused by the ion sputtering and the Ar ion implantation in the substrate surface layer are not the major factors that affect the orientation change. Instead, the implantation of W ions, which come from the hot filament of the ion gun, and the initial Ba deposition layer in the YBCO film growth play the most important roles in controlling the epitaxy orientation change. Microstructure studies show that a BaxMg1-xO buffer layer is formed on top of the sputtered substrate surface due to Ba diffusion into the W implanted layer. It is believed that the formation of this buffer layer relieves the large lattice mismatch and changes the YBCO film from the 45° oriented growth to the 0° oriented growth. Copyright © Materials Research Society 1998 Huang Y. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Vuchic B. V. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Carmody M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Baldo P. M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Merkle K. L. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 Buchholz D. B. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Mahajan S. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Lei J. S. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Markworth P. R. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Chang R. P. H. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Marks L. D. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 Journal of Materials Research Cambridge University Press 13/12(1998-12), 3378-3388 0884-2914 13:12<3378 1998 13 JMR https://doi.org/10.1557/JMR.1998.0460 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0460 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Huang Y. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Vuchic B. V. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Carmody M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Baldo P. M. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Merkle K. L. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439 NATIONALLICENCE 700 1- Buchholz D. B. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 700 1- Mahajan S. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 700 1- Lei J. S. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 700 1- Markworth P. R. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 700 1- Chang R. P. H. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 700 1- Marks L. D. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60201 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/12(1998-12), 3378-3388 0884-2914 13:12<3378 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge