caa a22 4500 388019859 CHVBK 20180307124921.0 cr unu---uuuuu 161130e199804 xx s 000 0 eng 10.1557/JMR.1998.0142 doi S088429140004379X pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0142 Role of ozone in reactive coevaporation of lead zirconate titanate thin films [Elektronische Daten] The role of ozone in the reactive coevaporation of the lead zirconate titanate thin film was investigated by depositing films at various growth rates with various ozone fluxes or molecular oxygen fluxes on unheated substrates and then crystallizing them using rapid thermal annealing. The oxidation state of lead in the as-deposited film was determined from the ratio of the ozone to the total metal fluxes. The amount of atomic oxygen supplied to the surface of the film was at least 103 times larger when the deposition was done using ozone rather than molecular oxygen. When the ozone flux was more than one-third of the total metal flux, well-oxidized films were obtained. To ensure obtaining well-oxidized film, the ozone flax should be more than twice as much. Copyright © Materials Research Society 1998 Torii Kazuyoshi Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan Yano Fumiko Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan Fujisaki Yoshihisa Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan Journal of Materials Research Cambridge University Press 13/4(1998-04), 1015-1021 0884-2914 13:4<1015 1998 13 JMR https://doi.org/10.1557/JMR.1998.0142 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0142 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Torii Kazuyoshi Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan NATIONALLICENCE 700 1- Yano Fumiko Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan NATIONALLICENCE 700 1- Fujisaki Yoshihisa Central Research Laboratory, Hitachi Ltd., 1-280 Higashi koigakubo, Kokubunji, Tokyo 185, Japan NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/4(1998-04), 1015-1021 0884-2914 13:4<1015 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge