caa a22 4500 388020539 CHVBK 20180307124923.0 cr unu---uuuuu 161130e199809 xx s 000 0 eng 10.1557/JMR.1998.0357 doi S0884291400045933 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0357 Formation of New Surface Layers on Ceramics by Ion Assisted Reaction [Elektronische Daten] Ar+ ions with 1 keV energy were irradiated on aluminum nitride in an O2 environment and on aluminum oxide in a N2 environment. AlON on AlN and AlN on Al2O3 are formed by the Ar1 irradiation in O2 gas and N2 gas environments, respectively, and the formation of new surface layers is confirmed on the basis of Al2p near core levels and O1s, N1s core levels XPS depth profile analysis. Cu(1000 Å) films were deposited by ion-beam sputtering on Ar+ irradiated/unirradiated AlN surfaces, and the change of the adhesion strength was investigated by a scratch test. Cu films deposited on the irradiated AlN under an O2 environment showed higher bond strength than that on the unirradiated AlN. The improvement of bond strength of Cu films on the AlN surface resulted from the interface bonds between Cu and the surface layers. The bending strength of polycrystalline Al2O3 irradiated by Ar+ ions in N2 environment was also increased and the formation of nitride layer on the alumina was confirmed. A possible new surface layer formation mechanism on ceramics by the ion assisted reaction has been discussed in terms of surface analysis, chemical bond, and mechanical strength. Copyright © Materials Research Society 1998 Koh S. K. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Son Y-B Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Gam J-S Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Han K-S Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Choi W. K. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Jung H-J Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea Journal of Materials Research Cambridge University Press 13/9(1998-09), 2560-2564 0884-2914 13:9<2560 1998 13 JMR https://doi.org/10.1557/JMR.1998.0357 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0357 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Koh S. K. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 700 1- Son Y-B Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 700 1- Gam J-S Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 700 1- Han K-S Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 700 1- Choi W. K. Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 700 1- Jung H-J Division of Ceramics, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, Seoul 130-650, Korea NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/9(1998-09), 2560-2564 0884-2914 13:9<2560 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge