caa a22 4500 38802075X CHVBK 20180307124923.0 cr unu---uuuuu 161130e199803 xx s 000 0 eng 10.1557/JMR.1998.0092 doi S0884291400043296 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0092 Spinning deposition of silica and silica-titania optical coatings: A round robin test [Elektronische Daten] A round robin test has been performed on sol-gel processing for the deposition of silica and silica-titania films on silicon substrates by spin-coating. Three solution preparation processes for silica coatings and three for silica-titania coatings were used to prepare samples at each of the participating laboratories. The films have been characterized mainly by thickness (profilometry and ellipsometry measurements), refractive index, porosity, and optical scattering. Different processes gave different thicknesses. Thickness differences were found in films prepared by the same process and by the same deposition parameters, but in different laboratories, when heat-treated at 500 °C. Variations were reduced in samples annealed at 1000 °C. Refractive index and porosity measurements suggest that variations were due to structural differences, particularly porosity. Furthermore, films heat-treated at 500 °C were not completely stabilized, and showed index and porosity variations after six months. Copyright © Materials Research Society 1998 Guglielmi M. Dipartimento di Ingegneria Meccanica, S. Materiali, Via Marzolo 9, 35131 Padova, Italy Martucci A. Dipartimento di Ingegneria Meccanica, S. Materiali, Via Marzolo 9, 35131 Padova, Italy Almeida R. M. INESC, R. Alves Redol 9, 1000 Lisboa, Portugal Vasconcelos H. C. INESC, R. Alves Redol 9, 1000 Lisboa, Portugal Yeatman E. M. Department of Electrical Engineering, Imperial College, London SW7 2BT, England Dawnay E. J. C. Department of Electrical Engineering, Imperial College, London SW7 2BT, England Fardad M. A. Department of Electrical Engineering, Imperial College, London SW7 2BT, England Journal of Materials Research Cambridge University Press 13/3(1998-03), 731-738 0884-2914 13:3<731 1998 13 JMR https://doi.org/10.1557/JMR.1998.0092 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0092 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Guglielmi M. Dipartimento di Ingegneria Meccanica, S. Materiali, Via Marzolo 9, 35131 Padova, Italy NATIONALLICENCE 700 1- Martucci A. Dipartimento di Ingegneria Meccanica, S. Materiali, Via Marzolo 9, 35131 Padova, Italy NATIONALLICENCE 700 1- Almeida R. M. INESC, R. Alves Redol 9, 1000 Lisboa, Portugal NATIONALLICENCE 700 1- Vasconcelos H. C. INESC, R. Alves Redol 9, 1000 Lisboa, Portugal NATIONALLICENCE 700 1- Yeatman E. M. Department of Electrical Engineering, Imperial College, London SW7 2BT, England NATIONALLICENCE 700 1- Dawnay E. J. C. Department of Electrical Engineering, Imperial College, London SW7 2BT, England NATIONALLICENCE 700 1- Fardad M. A. Department of Electrical Engineering, Imperial College, London SW7 2BT, England NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/3(1998-03), 731-738 0884-2914 13:3<731 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge