caa a22 4500 388020830 CHVBK 20180307124924.0 cr unu---uuuuu 161130e199803 xx s 000 0 eng 10.1557/JMR.1998.0076 doi S0884291400043132 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0076 Effects of hydrogenated amorphous carbon interlayer on diamond nucleation [Elektronische Daten] Diamond was deposited at 850 °C by microwave plasma chemical vapor deposition (CVD) on the interlayers with various intensity ratios (ID/IG) of the D band (~1400 cm-1) to the G band (~1570 cm-1) in the Raman spectra. Diamond could be grown only on the interlayers with higher ID/IG (≤1.95), and Nd was slightly increased to 3 × 106/cm2with ID/IG. The predeposition at 350 °C, which decreased the full-width at half-maximum of the broad D band, further increased Nd to 5 × 107/cm2. With 300 ÅA Pt overlayer on the interlayer, Nd was much more enhanced to 8 × 107/cm2. We suggest the sp3 bonded carbon clusters within the interlayer contribute to diamond nucleation, but they should be survived against atomic hydrogen etching during diamond deposition by increasing the sp3/sp2 ratio, by increasing the degree in clustering, or by protecting them with overlayer. Copyright © Materials Research Society 1998 Yang W. S. Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea Kim T. S. Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea Je Jung Ho Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea Journal of Materials Research Cambridge University Press 13/3(1998-03), 596-603 0884-2914 13:3<596 1998 13 JMR https://doi.org/10.1557/JMR.1998.0076 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0076 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Yang W. S. Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea NATIONALLICENCE 700 1- Kim T. S. Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea NATIONALLICENCE 700 1- Je Jung Ho Department of Materials Science and Engineering, Pohang University of Science -784, Republic of Korea NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/3(1998-03), 596-603 0884-2914 13:3<596 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge