caa a22 4500 38802089X CHVBK 20180307124924.0 cr unu---uuuuu 161130e199803 xx s 000 0 eng 10.1557/JMR.1998.0090 doi S0884291400043272 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0090 Sub-part-per-trillion detection and analysis of submicrometer particles in integrated circuit processing chemicals [Elektronische Daten] We have developed a new technique for the analysis of particulate contaminants in liquids (or gases) with an elemental detectability limit as low as 0.1 parts per trillion, and a particle concentration detectability limit as low as 1 particle/ml for particles greater than 0.2 μm in diameter. Samples are prepared using extraction replication and analyzed using analytical transmission electron microscopy. The methodology has been applied to the analysis of H2O2 and HF, important chemicals in integrated circuit fabrication. The new methodology should become an important tool in the identification of submicron-sized particles which adversely affect integrated circuit fabrication. Copyright © Materials Research Society 1998 Xu D. Department of Materials Science, University of North Texas, Denton, Texas 76203 Pinizzotto R. F. Department of Materials Science, University of North Texas, Denton, Texas 76203 Sees J. A. Texas Instruments Inc., P.O. Box 655012, MS 301, Dallas, Texas 75265 Journal of Materials Research Cambridge University Press 13/3(1998-03), 717-725 0884-2914 13:3<717 1998 13 JMR https://doi.org/10.1557/JMR.1998.0090 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0090 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Xu D. Department of Materials Science, University of North Texas, Denton, Texas 76203 NATIONALLICENCE 700 1- Pinizzotto R. F. Department of Materials Science, University of North Texas, Denton, Texas 76203 NATIONALLICENCE 700 1- Sees J. A. Texas Instruments Inc., P.O. Box 655012, MS 301, Dallas, Texas 75265 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/3(1998-03), 717-725 0884-2914 13:3<717 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge