caa a22 4500 38802111X CHVBK 20180307124924.0 cr unu---uuuuu 161130e199801 xx s 000 0 eng 10.1557/JMR.1998.0017 doi S0884291400042540 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0017 Uniform and rapid nucleation of diamond via bias-assisted hot filament chemical vapor deposition [Elektronische Daten] A new method was developed to obtain high density, uniform diamond nuclei via bias-assisted hot filament chemical vapor deposition. A negative bias was applied between a mesh (installed above the filament) and the substrate to produce abundant uniform ions at the growth surface. Raman spectroscopy, scanning electron microscopy, and Auger electron microscopy were used to analyze the films obtained. The results show that a layer of diamond film with a nucleation density of 109/cm2 can be obtained after 10 min deposition under 1 Torr. Copyright © Materials Research Society 1998 Chen Yan State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China Chen Feng State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China Wang E. G. State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China Journal of Materials Research Cambridge University Press 13/1(1998-01), 126-130 0884-2914 13:1<126 1998 13 JMR https://doi.org/10.1557/JMR.1998.0017 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0017 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Chen Yan State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China NATIONALLICENCE 700 1- Chen Feng State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China NATIONALLICENCE 700 1- Wang E. G. State Key Laboratory for Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-5, Beijing 100080, People's Republic of China NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/1(1998-01), 126-130 0884-2914 13:1<126 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge