caa a22 4500 388021152 CHVBK 20180307124924.0 cr unu---uuuuu 161130e199801 xx s 000 0 eng 10.1557/JMR.1998.0023 doi S0884291400042606 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0023 Metal-organic chemical vapor deposition of Sr-Co-Fe-O films on porous substrates [Elektronische Daten] Aerosol-assisted chemical vapor deposition using the β-diketonate precursors Sr(tmhd)2 · 2H2O, Fe(tmhd) 3, and Co(tmhd) 3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1−yO3−δ onto porous α-Al2O3 substrates. Single-phase SrCoyFe1−yO3−δ perovskite films were obtained at a deposition temperature of 550 °C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric pressure, and led to a supported film which was leak-tight to N2 flow. Copyright © Materials Research Society 1998 Xia Changfeng Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 Ward Timothy L. Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 Atanasova Paolina Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 Schwartz Robert W. Sandia National Laboratories, Advanced Materials Laboratory, 1001 University Boulevard SE, Albuquerque, New Mexico 87106 Journal of Materials Research Cambridge University Press 13/1(1998-01), 173-179 0884-2914 13:1<173 1998 13 JMR https://doi.org/10.1557/JMR.1998.0023 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0023 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Xia Changfeng Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 NATIONALLICENCE 700 1- Ward Timothy L. Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 NATIONALLICENCE 700 1- Atanasova Paolina Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131 NATIONALLICENCE 700 1- Schwartz Robert W. Sandia National Laboratories, Advanced Materials Laboratory, 1001 University Boulevard SE, Albuquerque, New Mexico 87106 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/1(1998-01), 173-179 0884-2914 13:1<173 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge