caa a22 4500 388021241 CHVBK 20180307124925.0 cr unu---uuuuu 161130e199801 xx s 000 0 eng 10.1557/JMR.1998.0024 doi S0884291400042618 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0024 An attempt to prepare carbon nitride by thermal plasma chemical vapor deposition from graphite and nitrogen [Elektronische Daten] RF induction thermal plasma was applied to the chemical vapor deposition of carbon nitride from graphite powders and Ar-N2 gas at about 1 atm. Low-density and fragile amorphous powder-like bulk deposits whose color is light yellow were obtained. Elementary analysis by a combustion method and x-ray photoelectron spectroscopy showed that the N/C ratio is higher than that of stoichiometric C3N4. Also, a large amount of hydrogen and oxygen are included, which seems to be due to the absorption of moisture and oxygen after exposure to air. Infrared absorption spectra suggest the presence of sp CN and sp2 CN bonds, and nitrogen-containing polycondensed ring structures. Thermogravimetric analysis with mass spectroscopy shows that the deposits decompose almost completely at 800 °C, suggesting that the polycondensed rings are not large and not well cross-linked. Copyright © Materials Research Society 1998 Matsumoto S. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan Chattopadhyay K. K. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan Mieno M. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan Ando T. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan Journal of Materials Research Cambridge University Press 13/1(1998-01), 180-186 0884-2914 13:1<180 1998 13 JMR https://doi.org/10.1557/JMR.1998.0024 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0024 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matsumoto S. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan NATIONALLICENCE 700 1- Chattopadhyay K. K. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan NATIONALLICENCE 700 1- Mieno M. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan NATIONALLICENCE 700 1- Ando T. National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba-city 305, Japan NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/1(1998-01), 180-186 0884-2914 13:1<180 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge