caa a22 4500 388021403 CHVBK 20180307124925.0 cr unu---uuuuu 161130e199802 xx s 000 0 eng 10.1557/JMR.1998.0049 doi S0884291400042862 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0049 Influence of the microstructure of Pt/Si substrates on textured growth of barium titanate thin films prepared by pulsed laser deposition [Elektronische Daten] Pt-coated silicon substrates with strong (111) Pt texture were annealed in an oxidizing atmosphere at temperatures from 500 °C to 750 °C. BaTiO3 thin films were deposited by pulsed laser ablation on the substrates. Observation by transmission electron microscopy showed that the substrate anneal caused the formation of TiO2 in the Pt layer, accompanied by the formation of a high density of faceted protrusions on the Pt surface, particularly at the higher anneal temperatures. The Pt protrusions had (111) facets, parallel to the substrate surface, on which (100)-oriented BaTiO3 grains were observed. BaTiO3 grains with an epitaxial relationship to the Pt lattice were observed on inclined facets of the Pt protrusions [which were not (111) planes], and also on the nonplanar regions of the Pt surface. These epitaxial BaTiO3 grains had (111) preferred orientation relative to the substrate surface. Thus, the BaTiO3 films displayed bimodal growth behavior, with both (100) texture and (111) epitaxy. We propose a model for this behavior based on surface energy considerations. Copyright © Materials Research Society 1998 Hwang Cheol Seong National Institute of Standards and Technology, Gaithersburg, Maryland 20899 Vaudin Mark D. National Institute of Standards and Technology, Gaithersburg, Maryland 20899 Schenck Peter K. National Institute of Standards and Technology, Gaithersburg, Maryland 20899 Journal of Materials Research Cambridge University Press 13/2(1998-02), 368-375 0884-2914 13:2<368 1998 13 JMR https://doi.org/10.1557/JMR.1998.0049 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0049 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Hwang Cheol Seong National Institute of Standards and Technology, Gaithersburg, Maryland 20899 NATIONALLICENCE 700 1- Vaudin Mark D. National Institute of Standards and Technology, Gaithersburg, Maryland 20899 NATIONALLICENCE 700 1- Schenck Peter K. National Institute of Standards and Technology, Gaithersburg, Maryland 20899 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/2(1998-02), 368-375 0884-2914 13:2<368 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge