caa a22 4500 388021462 CHVBK 20180307124925.0 cr unu---uuuuu 161130e199802 xx s 000 0 eng 10.1557/JMR.1998.0051 doi S0884291400042886 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0051 The dependence of structural and mechanical properties on film thickness in sol-gel zirconia films [Elektronische Daten] The structure, morphology, and mechanical properties of sol-gel zirconia films have been examined using XRD, AES depth profiling, AFM, and ultramicro indentation. There is a systematic variation in the structure and morphology of the zirconia films with increasing thickness. These changes include increases in the amount of monoclinic phase, substrate oxides, and a decrease in grain size. Ultramicro indentation measurements indicate measured hardness increases with film thickness. The highest hardness value was 6.12 GPa for a 900 nm thick film. However, these values may be influenced by the substrate oxide layer at the film/substrate interface which increases with film thickness. The modulus of the films appears to be thickness independent. As the films are made up of a number of separately fired layers, it appears that the property changes observed are also related to the number of thermal cycles experienced by the sample. Copyright © Materials Research Society 1998 Paterson Melissa J. School of Mathematics, Physics, Computing and Electronics, Macquarie University, Sydney, New South Wales 2109, Australia Paterson Peter J. K. Department of Applied Physics, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria 3001, Australia Ben-Nissan Besim Department of Materials Science, University of Technology, Sydney, P.O. Box 123, Broadway, New South Wales 2007, Australia Journal of Materials Research Cambridge University Press 13/2(1998-02), 388-395 0884-2914 13:2<388 1998 13 JMR https://doi.org/10.1557/JMR.1998.0051 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0051 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Paterson Melissa J. School of Mathematics, Physics, Computing and Electronics, Macquarie University, Sydney, New South Wales 2109, Australia NATIONALLICENCE 700 1- Paterson Peter J. K. Department of Applied Physics, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria 3001, Australia NATIONALLICENCE 700 1- Ben-Nissan Besim Department of Materials Science, University of Technology, Sydney, P.O. Box 123, Broadway, New South Wales 2007, Australia NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/2(1998-02), 388-395 0884-2914 13:2<388 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge