caa a22 4500 388021500 CHVBK 20180307124925.0 cr unu---uuuuu 161130e199802 xx s 000 0 eng 10.1557/JMR.1998.0062 doi S0884291400042990 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0062 A study of piezoelectric orthorhombic Ta2O5 [Elektronische Daten] In 1985 it was first reported that monoclinic Ta2O5 has piezoelectric properties comparable to ZnO. In this work we report on the deposition, characterization, and qualitative assessment of the piezoelectric behavior of orthorhombic Ta2O5. Reactive magnetron sputtering was used to deposit thin films of Ta2O5 onto substrates of 316L stainless steel. Without substrate heating the crystallinity was poor. A rapid thermal anneal improved the crystallinity. The orthorhombic phase was dominantly present on all substrates. The piezoelectric property was qualitatively assessed, including a high temperature test at 650 °C. Copyright © Materials Research Society 1998 Jooste B. R. Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126 Viljoen H. J. Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126 Journal of Materials Research Cambridge University Press 13/2(1998-02), 475-482 0884-2914 13:2<475 1998 13 JMR https://doi.org/10.1557/JMR.1998.0062 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0062 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jooste B. R. Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126 NATIONALLICENCE 700 1- Viljoen H. J. Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0126 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/2(1998-02), 475-482 0884-2914 13:2<475 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge