caa a22 4500 388021667 CHVBK 20180307124926.0 cr unu---uuuuu 161130e199802 xx s 000 0 eng 10.1557/JMR.1998.0048 doi S0884291400042850 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0048 Reactive ion etching damage to the electrical properties of ferroelectric thin films [Elektronische Daten] Reactive ion etching damage to Pt/Pb(Zr, Ti)O3/Pt ferroelectric capacitors was evaluated under Ar bombardment and CHClFCF3 etch plasmas. The hysteresis and degradation properties, including fatigue and leakage current, were examined systematically to study the mechanism of damage. The damage was measured quantitatively by comparing the relative voltage shift with respect to the initial hysteresis loops. The damage effects were found to be dependent on etching time and mainly due to the physical effect of ion bombardment. The electrical properties of the etched Pt/Pb(Zr, Ti)O3/Pt capacitors were substantially recovered by annealing at 400 °C for 30 min. Copyright © Materials Research Society 1998 Pan W. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 Thio C. L. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 Desu S. B. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 Journal of Materials Research Cambridge University Press 13/2(1998-02), 362-367 0884-2914 13:2<362 1998 13 JMR https://doi.org/10.1557/JMR.1998.0048 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0048 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Pan W. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 NATIONALLICENCE 700 1- Thio C. L. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 NATIONALLICENCE 700 1- Desu S. B. Materials Science and Engineering Department, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061-0237 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/2(1998-02), 362-367 0884-2914 13:2<362 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge