caa a22 4500 388021799 CHVBK 20180307124926.0 cr unu---uuuuu 161130e199807 xx s 000 0 eng 10.1557/JMR.1998.0258 doi S0884291400044940 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0258 Inner surface reaction and modification of titanium alloy by a new plasma source ion implantation method [Elektronische Daten] The inner surface of a cylindrical titanium alloy target was successfully implanted with nitrogen ion using a new plasma source ion implantation method. By means of x-ray photoelectron spectroscopy and x-ray diffraction, the reactive phases and their chemical state in the implanted layer were investigated. In order to characterize the modification effect and its uniformity, the retained dose and the microhardness at seven different positions along the axis on the inner surface of the cylindrical target were measured, respectively. The experimental results show that a TiN reactive phase was formed in the implanted layer, which contributed to the improvement of inner surface microhardness. The root-mean-square deviations of retained dose and microhardness measured along the axis of the target are less than 9% and 4%, respectively, which are well within an acceptable tolerance range for metallic applications of ion implantation. Copyright © Materials Research Society 1998 Sun Mu State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China Xie Kan State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China Yang Si-ze State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China Journal of Materials Research Cambridge University Press 13/7(1998-07), 1823-1827 0884-2914 13:7<1823 1998 13 JMR https://doi.org/10.1557/JMR.1998.0258 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0258 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Sun Mu State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China NATIONALLICENCE 700 1- Xie Kan State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China NATIONALLICENCE 700 1- Yang Si-ze State Key Laboratory of Surface Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603-8, Beijing 100080, People's Republic of China NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/7(1998-07), 1823-1827 0884-2914 13:7<1823 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge