caa a22 4500 388021810 CHVBK 20180307124926.0 cr unu---uuuuu 161130e199807 xx s 000 0 eng 10.1557/JMR.1998.0252 doi S0884291400044885 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0252 Aselage T. L. Sandia National Laboratories, Albuquerque, New Mexico 87185-1421 The coexistence of silicon borides with boron-saturated silicon: Metastability of SiB3 [Elektronische Daten] [T. L. Aselage] The silicon-rich end of the Si-B phase diagram, defining the silicon boride(s) that coexist in equilibrium with boron-saturated silicon, is poorly known. Understanding this equilibrium has implications for the processing of p+ silicon wafers, whose boron concentrations are near the solubility limit. Additionally, silicon boride precipitates produced by boron-ion-implantation and annealing of crystalline silicon have recently been shown to be efficient internal getters of transition metal ions. The experiments described in this paper probe the stability of these silicon borides. A phase with a boron-carbide-like structure, SiB3, grows from boron-saturated silicon in both the solid and the liquid state. However, SiB3 is not found to be stable in either circumstance. Rather, SiB3 is a metastable phase whose formation is driven by the relative ease of its nucleation and growth. The silicon boride that exists in stable equilibrium with boron-saturated silicon is SiB6. A qualitative understanding of the metastability of SiB3 comes from recognizing the conflict between the bonding requirements of icosahedral borides such as SiB3 and the size mismatch between silicon and boron atoms. Copyright © Materials Research Society 1998 Journal of Materials Research Cambridge University Press 13/7(1998-07), 1786-1794 0884-2914 13:7<1786 1998 13 JMR https://doi.org/10.1557/JMR.1998.0252 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0252 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Aselage T. L. Sandia National Laboratories, Albuquerque, New Mexico 87185-1421 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/7(1998-07), 1786-1794 0884-2914 13:7<1786 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge