caa a22 4500 388021918 CHVBK 20180307124926.0 cr unu---uuuuu 161130e199807 xx s 000 0 eng 10.1557/JMR.1998.0249 doi S088429140004485X pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0249 Effects of substrate pretreatment and methane fraction on the optical transparency of nanocrystalline diamond thin films [Elektronische Daten] Optical transmittance of the nanocrystalline diamond films has been studied as a function of grain size of the diamond powder used for substrate pretreatment and the methane fraction in the source gas. It has been observed that for CH4 fractions below 13%, the films grown on substrates pretreated with finer diamond powder are more transparent, while this trend reverses for CH4 fractions above 13%. These variations in the transparency of the films correlate very well with their corresponding surface roughness. Nanocrystalline/amorphous diamond films with transmittance of greater than 80% beyond 700 nm and with average surface roughness as low as 61 Å have been obtained for CH4 fractions as high as 42% in the source gas. Interestingly, these films do not show an obvious presence of any graphitic carbon, and the structural ordering of the amorphous sp3-bonded phase also seems to be insensitive to the CH4 content of the source gas. Copyright © Materials Research Society 1998 Bhusari D. M. Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan Yang J. R. Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan Wang T. Y. Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan Chen K. H. Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan Lin S. T. Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan Chen L. C. Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan Journal of Materials Research Cambridge University Press 13/7(1998-07), 1769-1773 0884-2914 13:7<1769 1998 13 JMR https://doi.org/10.1557/JMR.1998.0249 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0249 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Bhusari D. M. Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan NATIONALLICENCE 700 1- Yang J. R. Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan NATIONALLICENCE 700 1- Wang T. Y. Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan NATIONALLICENCE 700 1- Chen K. H. Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan NATIONALLICENCE 700 1- Lin S. T. Department of Mechanical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan NATIONALLICENCE 700 1- Chen L. C. Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/7(1998-07), 1769-1773 0884-2914 13:7<1769 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge