caa a22 4500 388022140 CHVBK 20180307124927.0 cr unu---uuuuu 161130e199808 xx s 000 0 eng 10.1557/JMR.1998.0326 doi S0884291400045623 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0326 Constrained-film sintering of cordierite glass-ceramic on silicon substrate [Elektronische Daten] The densification behavior of cordierite glass-ceramic films constrained on a rigid silicon substrate was studied in the temperature range from 900 °C to 1000 °C. An optical setup was used to obtain the thickness versus time profiles and in-plane stresses of the constrained glass-ceramic during isothermal sintering. The thickness profiles showed a rapid shrinkage due to sintering followed by an expansion corresponding to crystallization of the glass-ceramic. Measurements of in-plane stresses in constrained-sintering films showed a rapidly rising tensile stress during densification followed by a slight drop during crystallization. In films sintered above 950 °C, the tensile stress rose rapidly again near the end of crystallization, suggesting a further densification in a mostly crystallized film. Scanning electron microscope (SEM) micrographs of the film cross sections revealed the formation and growth of large pores along the interface between the glass-ceramic and silicon substrate that may have contributed to the observed film expansion. These pores are substantially larger than the initial pore size in the films, indicating that they were formed during sintering. We believe that poor wetting of the glass-ceramic on silicon may have contributed to the formation of the porous structure at the interface. Copyright © Materials Research Society 1998 Calata Jesus Noel Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 Matthys Allen Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 Lu Guo-Quan Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 Journal of Materials Research Cambridge University Press 13/8(1998-08), 2334-2341 0884-2914 13:8<2334 1998 13 JMR https://doi.org/10.1557/JMR.1998.0326 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0326 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Calata Jesus Noel Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 NATIONALLICENCE 700 1- Matthys Allen Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 NATIONALLICENCE 700 1- Lu Guo-Quan Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/8(1998-08), 2334-2341 0884-2914 13:8<2334 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge