caa a22 4500 388022183 CHVBK 20180307124927.0 cr unu---uuuuu 161130e199808 xx s 000 0 eng 10.1557/JMR.1998.0296 doi S0884291400045325 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0296 Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel [Elektronische Daten] Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α-Ti, ε-Ti2N, and δ-TiN phases were identified by grazing x-ray diffraction. Copyright © Materials Research Society 1998 Rodrigo M. T. Universidad Autónoma de Madrid, 28049 Madrid, Spain Jiménez C. Universidad Autónoma de Madrid, 28049 Madrid, Spain Váquez L. Instituto Ciencia de Materiales, C.S.I.C., 28049 Madrid, Spain Alonso F. INASMET-Camino de Portuetxe, 12-20009 San Sebastián, Spain Fernández M. Instituto Ciencia de Materiales, C.S.I.C., 28049 Madrid, Spain Martínez-Duart J. M. Universidad Autónoma de Madrid, 28049 Madrid, Spain Journal of Materials Research Cambridge University Press 13/8(1998-08), 2117-2122 0884-2914 13:8<2117 1998 13 JMR https://doi.org/10.1557/JMR.1998.0296 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0296 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Rodrigo M. T. Universidad Autónoma de Madrid, 28049 Madrid, Spain NATIONALLICENCE 700 1- Jiménez C. Universidad Autónoma de Madrid, 28049 Madrid, Spain NATIONALLICENCE 700 1- Váquez L. Instituto Ciencia de Materiales, C.S.I.C., 28049 Madrid, Spain NATIONALLICENCE 700 1- Alonso F. INASMET-Camino de Portuetxe, 12-20009 San Sebastián, Spain NATIONALLICENCE 700 1- Fernández M. Instituto Ciencia de Materiales, C.S.I.C., 28049 Madrid, Spain NATIONALLICENCE 700 1- Martínez-Duart J. M. Universidad Autónoma de Madrid, 28049 Madrid, Spain NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/8(1998-08), 2117-2122 0884-2914 13:8<2117 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge