caa a22 4500 388022272 CHVBK 20180307124927.0 cr unu---uuuuu 161130e199808 xx s 000 0 eng 10.1557/JMR.1998.0321 doi S088429140004557X pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0321 Microstructural characteristics of conductive SrRuO3 thin films formed by pulsed-laser deposition [Elektronische Daten] Transmission electron microscopy and high-resolution electron microscopy have been used to study microstructural properties of conductive SrRuO3 films grown by pulsed laser deposition on (001) LaAlO3 and (001) SrTiO3 substrates. It was found that the SrRuO3 films deposited on both substrates consist of mixed domains of [001] and [110] orientations, with orientation relationships that can be described as (i) (001)f ‖ (001)s and [110]f ‖ [100]s and (ii) (110)f ‖ (001)s and [001]f ‖ [100]s, respectively. The SrRuO3 films deposited on SrTiO3, in particular, were found to have a layered domain structure, with the [110] domain grown initially on the substate, followed by growth of the [001] oriented domain with increasing thickness. The films on SrTiO3 are strained and have a coherent interface with the substrate. The SrRuO3 films deposited on LaAlO3, on the other hand, contain a high density of structural defects such as stacking faults and microtwins on the (022) planes. Microtwins as large as 50 nm in thickness are observed in the films deposited on LaAlO3. Possible causes for the observed structural defects in the films are discussed. Copyright © Materials Research Society 1998 Lu P. Department of Materials Science and Engineering, New Mexico Institute of Mining and Technology, Socorro, New Mexico 87801 Chu F. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 Jia Q. X. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 Mitchell T. E. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 Journal of Materials Research Cambridge University Press 13/8(1998-08), 2302-2307 0884-2914 13:8<2302 1998 13 JMR https://doi.org/10.1557/JMR.1998.0321 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0321 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lu P. Department of Materials Science and Engineering, New Mexico Institute of Mining and Technology, Socorro, New Mexico 87801 NATIONALLICENCE 700 1- Chu F. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 NATIONALLICENCE 700 1- Jia Q. X. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 NATIONALLICENCE 700 1- Mitchell T. E. Materials Science and Technology Division, MS K765, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/8(1998-08), 2302-2307 0884-2914 13:8<2302 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge