caa a22 4500 388022574 CHVBK 20180307124928.0 cr unu---uuuuu 161130e199805 xx s 000 0 eng 10.1557/JMR.1998.0181 doi S0884291400044174 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0181 Study on preparing PLT(28) thin film and its electro-optic effect [Elektronische Daten] PLT(28) thin films deposited on glass substrates were studied by two sputtering processes. One is an in situ magnetron sputtering and the other is a low-temperature magnetron sputtering. The sintered PLT ceramic powders are used as a sputtering target for both processes. The influences of sputtering and annealing conditions on structure and crystallinity of the films were investigated. The electro-optic (E-O) properties of PLT(28) thin films prepared by the two processes were determined by a technique according to Faraday effect. The researches showed the E-O properties were strongly affected by the sputtering process. The film with larger grains exhibits stronger E-O effect. The quadratic E-O coefficient of PLT(28) thin film varies in the range of 0.1 × 10−16 to 1.0 × 10−16 (m/v)2. Copyright © Materials Research Society 1998 Ding Ai-Li Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China Luo Wei-Gen Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China Qiu P. S. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China Feng J. W. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China Zhang R. T. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China Journal of Materials Research Cambridge University Press 13/5(1998-05), 1266-1270 0884-2914 13:5<1266 1998 13 JMR https://doi.org/10.1557/JMR.1998.0181 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0181 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ding Ai-Li Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China NATIONALLICENCE 700 1- Luo Wei-Gen Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China NATIONALLICENCE 700 1- Qiu P. S. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China NATIONALLICENCE 700 1- Feng J. W. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China NATIONALLICENCE 700 1- Zhang R. T. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/5(1998-05), 1266-1270 0884-2914 13:5<1266 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge