caa a22 4500 388022930 CHVBK 20180307124929.0 cr unu---uuuuu 161130e199805 xx s 000 0 eng 10.1557/JMR.1998.0183 doi S0884291400044198 pii (NATIONALLICENCE)cambridge-10.1557/JMR.1998.0183 Effect of (La0.5Sr0.5)CoO3 and Pt intermediate layers on improving the stability of Pb1-xLaxTi1-x/4O3 films [Elektronische Daten] Deposition of a (La0.5Sr0.5)CoO3 (LSCO) layer on top of Pt/Ti/Si substrates was observed to substantially improve the stability of the subsequently deposited Pb1−xLaxTi1−x/4O3 (PLT) films. Platinum coating of silicon substrates by itself is known to enhance the formation of PLT phase. In this paper, the elemental depth profile examined by secondary ion mass spectroscopy (SIMS) and the structural profile examined by grazing angle incident x-ray diffractometry (GIXD) reveals that the Ti species precoated underneath the Pt layer diffuses outward through the Pt layer at high temperature, forming a rutile TiO2 layer on top of Pt coating. It is this outermost TiO2 layer which promotes the transformation kinetics of the PLT species adhered onto substrates into the perovskite phase. Thus obtained films (PLT/Pt/Ti/Si) are, however, not stable enough to survive subsequent high-temperature processing. On the other hand, the PLT/LSCO/Pt/Ti/Si films, which incorporate LSCO as buffer layer, can survive 650 °C without significant deterioration. Copyright © Materials Research Society 1998 Wang J. P. Department of Chemistry, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China Ling Y. C. Department of Chemistry, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China Tseng Y. K. Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China Liu K. S. Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China Lin I. N. Materials Science Center, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China Journal of Materials Research Cambridge University Press 13/5(1998-05), 1286-1290 0884-2914 13:5<1286 1998 13 JMR https://doi.org/10.1557/JMR.1998.0183 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/JMR.1998.0183 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang J. P. Department of Chemistry, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China NATIONALLICENCE 700 1- Ling Y. C. Department of Chemistry, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China NATIONALLICENCE 700 1- Tseng Y. K. Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China NATIONALLICENCE 700 1- Liu K. S. Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China NATIONALLICENCE 700 1- Lin I. N. Materials Science Center, National Tsing-Hua University, Hsinchu 30043, Taiwan, Republic of China NATIONALLICENCE 773 0- Journal of Materials Research Cambridge University Press 13/5(1998-05), 1286-1290 0884-2914 13:5<1286 1998 13 JMR CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge