caa a22 4500 38807664X CHVBK 20180307125201.0 cr unu---uuuuu 161130e199902 xx s 000 0 eng 10.1557/S0883769400051526 doi S0883769400051526 pii (NATIONALLICENCE)cambridge-10.1557/S0883769400051526 Stresses in Multilayered Thin Films [Elektronische Daten] Almost all thin films deposited on a substrate are in a state of stress. Fifty years ago pioneering work concerning the measurement of thin-film stresses was conducted by Brenner and Senderoff. They electroplated a metal film onto a thin metal substrate strip fixed at one end and measured the deflection of the free end of the substrate with a micrometer. Using a beam-bending analysis, they were able to calculate a residual stress from the measured deflection of the bimetallic film-substrate system. A variety of other, more sensitive methods of measuring the curvature of the surface of a film-substrate system have since been developed using, for example, capacitance measurements and interferometry techniques. When a monochromatic x-ray beam is incident onto a curved single crystal, the diffraction condition is satisfied only for regions of the crystal where the inclination angle with respect to the incident beam exactly matches the Bragg angle. When a parallel beam plane-wave source is used, the diffracted beam from a particular set of (hkl) planes gives rise to a single narrow-contour band. If the crystal is rocked by an angle ω, the contour band will move by a certain distance D. The radius of curvature R of the crystal lattice planes is given by where θ is the Bragg angle. Equal rocking angles produce equivalent D values for uniform curvature, or varied D values for nonuniform curvature. Using this procedure, detailed contour maps of the angular displacement field of the crystal can be mapped in two dimensions. Copyright © Materials Research Society 1999 Cammarata Robert C. Bilello John C. Greer A. Lindsay Sieradzki Karl Yalisove Steven M. MRS Bulletin Cambridge University Press 24/2(1999-02), 34-38 0883-7694 24:2<34 1999 24 MRS https://doi.org/10.1557/S0883769400051526 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1557/S0883769400051526 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Cammarata Robert C. NATIONALLICENCE 700 1- Bilello John C. NATIONALLICENCE 700 1- Greer A. Lindsay NATIONALLICENCE 700 1- Sieradzki Karl NATIONALLICENCE 700 1- Yalisove Steven M. NATIONALLICENCE 773 0- MRS Bulletin Cambridge University Press 24/2(1999-02), 34-38 0883-7694 24:2<34 1999 24 MRS CC0 http://creativecommons.org/publicdomain/zero/1.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-cambridge