caa a22 4500 397569629 CHVBK 20180308164837.0 cr unu---uuuuu 161202e199610 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023462 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023462 Transmission Electron Microscopic Observation of Grain Boundaries in CVD Diamond Thin Films [Elektronische Daten] [Yaogang Zhang, Hideki Ichinose, Megumi Nakanose, Kunio Ito, Yoichi Ishida] Polycrystalline diamond thin films were grown by electrocyclotron resonance chemical vapor deposition (ECR-CVD). Electron diffraction, conventional transmission electron microscopy and high-resolution electron microscopy were used to characterise the grain boundary structure in the films. The films showed microstructures consisting of micrometer scale grains and twins inside these grains. Most of the boundaries were <110> tilt boundaries even though twist boundaries were also observed. The low-angle tilt boundaries were usually curved and sometimes deviated from the <110> axis. The high-angle boundaries were mainly {111} Σ3 coincidence-site-lattice (CSL) boundaries. Other Σ3, Σ9 and Σ27 CSL boundaries were usually observed to be connected with {111} Σ3 CSL boundaries. The Σ9 CSL boundaries often appeared parallel to {114} planes instead of {221} planes. The relation between the grain boundary structure and film growth procedure is discussed. © 1996 Oxford University Press Full-length Papers nationallicence transmission electron microscopy nationallicence electron diffraction nationallicence grain boundary nationallicence diamond thin films nationallicence chemical vapor deposition nationallicence Zhang Yaogang Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut Ichinose Hideki Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut Nakanose Megumi Aerospace Division, Nissan Motor Inc. Momoi 3-5-1, Suginami-ku, Tokyo, 167 Japan aut Ito Kunio Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut Ishida Yoichi Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut Microscopy Oxford University Press 45/5(1996-10), 436-441 0022-0744 45:5<436 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023462 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023462 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhang Yaogang Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut NATIONALLICENCE 700 1- Ichinose Hideki Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut NATIONALLICENCE 700 1- Nakanose Megumi Aerospace Division, Nissan Motor Inc. Momoi 3-5-1, Suginami-ku, Tokyo, 167 Japan aut NATIONALLICENCE 700 1- Ito Kunio Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut NATIONALLICENCE 700 1- Ishida Yoichi Department of Materials Science, Faculty of Engineering. The University of Tokyo Hongo 7-3-1, Bunkyo-ku, Tokyo, 113 Japan aut NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/5(1996-10), 436-441 0022-0744 45:5<436 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford