caa a22 4500 397569645 CHVBK 20180308164837.0 cr unu---uuuuu 161202e199610 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023452 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023452 Secondary Electron Detection Efficiency for Magnetic Lenses with a Retarding Electrostatic Field [Elektronische Daten] [Mamoru Nakasuji, Hiroyasu Shimizu] The properties of a secondary electron (SE) detector are studied for the case of a retarding field scanning electron microscope (SEM) where the SE detector is placed above the objective lens and a mixed field configuration exists in which the electrostatic field within the lens is superimposed on the lens magnetic field. The SE collection efficiency was calculated by tracing SE trajectories. By installing a repeller electrode with a −100 V potential around the SE detector position, all the SEs emitted from the specimen in the direction of the upper hemisphere were collected by the SE detector. The repeller electrode consisted of an aperture plate attached above the SE detector and a coaxial cylindrical metal tube mounted to the bottom of the aperture plate. When the axial chromatic aberration generated by the electrostatic bi-potential lens, formed from the beam tube and the repeller plate; was made small enough, the total chromatic aberration coefficient for the primary electron (PE) beam was 0.7 mm for a working distance of 15 mm, where the potentials of the electron gun, beam tube and specimen were −500, 10,000 and 0V, respectively. © 1996 Oxford University Press Full-length Papers nationallicence secondary electron nationallicence asymmetrical field nationallicence retarding electric field nationallicence immersion lens nationallicence collection efficiency nationallicence Nakasuji Mamoru 2nd Designing Department, IC & LCD Equipment Division, Ohi Plant, Nikon Corporation, 6-3 Nishi-Ohi l-chome, Shinagawa-ku, Tokyo, 140 Japan aut Shimizu Hiroyasu 2nd Designing Department, IC & LCD Equipment Division, Ohi Plant, Nikon Corporation, 6-3 Nishi-Ohi l-chome, Shinagawa-ku, Tokyo, 140 Japan aut Microscopy Oxford University Press 45/5(1996-10), 359-363 0022-0744 45:5<359 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023452 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023452 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Nakasuji Mamoru 2nd Designing Department, IC & LCD Equipment Division, Ohi Plant, Nikon Corporation, 6-3 Nishi-Ohi l-chome, Shinagawa-ku, Tokyo, 140 Japan aut NATIONALLICENCE 700 1- Shimizu Hiroyasu 2nd Designing Department, IC & LCD Equipment Division, Ohi Plant, Nikon Corporation, 6-3 Nishi-Ohi l-chome, Shinagawa-ku, Tokyo, 140 Japan aut NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/5(1996-10), 359-363 0022-0744 45:5<359 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford