caa a22 4500 397569742 CHVBK 20180308164838.0 cr unu---uuuuu 161202e199610 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023465 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023465 Development of a Nanoprobe Cathodoluminescence Scanning Electron Microscope [Elektronische Daten] [Hiroshi Matsuo, Nobutaka Kobayashi, Yoshihide Kimura, Ryuichi Shimizu] A nanoprobe cathodoluminescence (CL) scanning electron microscope was developed, in which a specific optical system consisting of an ellipsoidal mirror, optical light guide, spectrometer and specimen holder was attached to a field-emission scanning electron microscope, Hitachi S700. This microscope enables a highly sensitive cathodoluminescence analysis of local areas of submicron size for bulk specimens and nanometer size for thin specimens without any deterioration caused by the light from a conventional hot cathode. A preliminary experiment was done with fluorescent materials used for a commercial-type cathode-ray tube, to confirm the potentiality for characterization of electronic properties of local areas of nanometer size. © 1996 Oxford University Press Letters nationallicence cathodoluminescence nationallicence field-emission SEM nationallicence microcharacterization nationallicence fluorescent materials nationallicence Matsuo Hiroshi Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut Kobayashi Nobutaka Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut Kimura Yoshihide Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut Shimizu Ryuichi Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut Microscopy Oxford University Press 45/5(1996-10), 453-457 0022-0744 45:5<453 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023465 text/html Onlinezugriff via DOI 1 article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023465 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matsuo Hiroshi Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut NATIONALLICENCE 700 1- Kobayashi Nobutaka Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut NATIONALLICENCE 700 1- Kimura Yoshihide Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut NATIONALLICENCE 700 1- Shimizu Ryuichi Department of Applied Physics, Faculty of Engineering, Osaka University, 2-1, Yamada-oka, Sulta, Osaka, 565 Japan aut NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/5(1996-10), 453-457 0022-0744 45:5<453 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford