caa a22 4500 397569750 CHVBK 20180308164838.0 cr unu---uuuuu 161202e199608 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023444 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023444 Practical Performance of Energy-Dispersive X-Ray Spectroscopy with a High-Voltage TEM up to 1,000 kV [Elektronische Daten] [Kazuo Furuya, Mitsuaki Osaki, Mitsuhiro Awaji, Tetsuya Saito] The performance of energy-dispersive X-ray spectroscopy (EDS) with a new analytical high-voltage TEM is reported. A detector with an ultrathin window was designed to set in a horizontal position, and shielding devices of apertures and metal blocks were specially inserted into the column to reduce stray X-rays generated by primary electrons up to 1,000 kV. The characteristic X-ray spectra of type-316 austenitic stainless steel were successfully measured at 400 to 1,000 kV with changing the energy resolution from 142 to 159eV for a Fe-Kα peak. The noise level at the X-ray energy below 1 keV slightly increased during the operation at 1,000 kV and the insufficient shield at the gun alignment coil system could be responsible for the generation of the background X-rays. The usefulness of EDS analyses at 1,000 kV is demonstrated for Si(100) from the viewpoint of the relative low contamination of carbon which provides an advantage for the light element analysis. © 1996 Oxford University Press Full-length Papers nationallicence energy-dispersive X-ray spectroscopy (EDS) nationallicence high-voltage TEM nationallicence background X-ray nationallicence low contamination of carbon nationallicence Furuya Kazuo JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut Osaki Mitsuaki JEOL Ltd. Co. 3-1-2 Musashino, Mashima, Tokyo, 196 Japan aut Awaji Mitsuhiro JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut Saito Tetsuya JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut Microscopy Oxford University Press 45/4(1996-08), 285-290 0022-0744 45:4<285 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023444 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023444 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Furuya Kazuo JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut NATIONALLICENCE 700 1- Osaki Mitsuaki JEOL Ltd. Co. 3-1-2 Musashino, Mashima, Tokyo, 196 Japan aut NATIONALLICENCE 700 1- Awaji Mitsuhiro JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut NATIONALLICENCE 700 1- Saito Tetsuya JEOL Ltd. Co., 3-1-2 Musashino, Mashima, Tokyo, 196 Japan, 1-2-1 Sengen, Tsukuba, Ibaraki, 305 Japan aut NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/4(1996-08), 285-290 0022-0744 45:4<285 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford