caa a22 4500 397569920 CHVBK 20180308164838.0 cr unu---uuuuu 161202e199602 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023404 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023404 Application of Nano-Diffraction to Local Structure Analysis of Amorphous Pd75Si25 Alloy Thin Films [Elektronische Daten] [Mitsuhide Matsushita, Yoshihiko Hirotsu, Tadakatsu Ohkubo, Tetsuo Oikawa] Nano-probe electron diffraction has been applied to local structure analysis of a sputter-deposited amorphous Pd75Si25 alloy thin film with the help of high-resolution electron microscopy. Corresponding to local lattice fringe images due to the atomic medium range order (MRO) extending over 1 to 3 run, nano-diffraction patterns with various zone-axes were obtained by using a field emission transmission electron microscope. It was found that the structure of MRO is hexagonal of the Pd2Si-type with lattice parameters a = 0.715 and c = 0.312 nm. Nearest neighbor atomic distances of Pd-Pd and Pd-Si obtained from the present analysis were compared with those obtained from the pair distribution function analysis made by using halo electron diffraction pattern of the same specimen. On the basis of nano-diffraction pattern calculations, a discussion was made on the limitation of structural analysis of MRO structures by nano-diffraction. © 1996 Oxford University Press Articles nationallicence nano-diffraction nationallicence high-resolution electron microscopy (HREM) nationallicence field emission transmission electron microscope (FE-TEM) nationallicence medium range order (MRO) nationallicence amorphous alloy nationallicence Matsushita Mitsuhide Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut Hirotsu Yoshihiko Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut Ohkubo Tadakatsu Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut Oikawa Tetsuo JEOL Ltd. Akishima, 196 Japan aut Microscopy Oxford University Press 45/1(1996-02), 105-112 0022-0744 45:1<105 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023404 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023404 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matsushita Mitsuhide Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut NATIONALLICENCE 700 1- Hirotsu Yoshihiko Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut NATIONALLICENCE 700 1- Ohkubo Tadakatsu Institute of Sçientific and Industrial Research, Osaka University, Ibaraki, 567 Japan, Akishima, 196 Japan aut NATIONALLICENCE 700 1- Oikawa Tetsuo JEOL Ltd. Akishima, 196 Japan aut NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/1(1996-02), 105-112 0022-0744 45:1<105 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford