caa a22 4500 397569955 CHVBK 20180308164838.0 cr unu---uuuuu 161202e199602 xx s 000 0 eng 10.1093/oxfordjournals.jmicro.a023412 doi (NATIONALLICENCE)oxford-10.1093/oxfordjournals.jmicro.a023412 Batson P. E. IBM Thomas J. Watson Research Center, Route 134, Yorktown Heights, New York 10598, U.S.A. Atomic Resolution Electronic Structure in Silicon-Based Semiconductors [Elektronische Daten] [P. E. Batson] An experimental method for obtaining conduction band electronic structure from the silicon L2,3 absorption edge is reviewed. The method uses Spatially Resolved Electron Energy Loss Spectroscopy in conjunction with a field emission Scanning Transmission Electron Microscope. The best spectroscopic resolution obtained is 160 meV with an energy scale accuracy of ±20 meV using 120 keV electrons. The spectroscopy is combined with High Angle Annular Dark Field imaging with a 0.2-nm diameter probe to obtain nearly atomic resolution point spectroscopic analyses. Atomic bonding at a Si/SiO2 interface, conduction bandstructure in the relaxed GexSi1−x alloy system and conduction band offsets in nanometer thick strained quantum wells have been obtained. Future work aims at relating defect electronic structure with directly obtained electronic structure. © 1996 Oxford University Press Articles nationallicence EELS nationallicence STEM nationallicence electronic structure nationallicence ADF imaging nationallicence GeSi alloys nationallicence Microscopy Oxford University Press 45/1(1996-02), 51-58 0022-0744 45:1<51 1996 45 jmicro https://doi.org/10.1093/oxfordjournals.jmicro.a023412 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1093/oxfordjournals.jmicro.a023412 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Batson P. E. IBM Thomas J. Watson Research Center, Route 134, Yorktown Heights, New York 10598, U.S.A NATIONALLICENCE 773 0- Microscopy Oxford University Press 45/1(1996-02), 51-58 0022-0744 45:1<51 1996 45 jmicro Metadata rights reserved CC BY-NC-4.0 http://creativecommons.org/licenses/by-nc/4.0 nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-oxford