Formation of thin nanostructured layers during heterogeneous gas-phase synthesis from small-size volatile metal complexes on the surface of semiconductors and dielectrics
Gespeichert in:
Verfasser / Beitragende:
[A. Badalyan, L. Bakhturova, V. Kaichev, B. Kashnikov, O. Polyakov, O. Pchelyakov, G. Smirnov]
Ort, Verlag, Jahr:
2010
Enthalten in:
Technical Physics Letters, 36/3(2010-03-01), 265-268
Format:
Artikel (online)
Online Zugang: