Features of the spectra of optical emission from high-frequency discharge plasma during bismuth ferrite sputtering

Verfasser / Beitragende:
[P. Plyaka, G. Tolmachev]
Ort, Verlag, Jahr:
2010
Enthalten in:
Technical Physics Letters, 36/2(2010-02-01), 192-194
Format:
Artikel (online)
ID: 445130520