Understanding and Modeling the Resistance of High Aspect Ratio FIB-Fabricated Tungsten Vias

Verfasser / Beitragende:
[David Niles, Walter Dauksher, Ronald Kee]
Ort, Verlag, Jahr:
2010
Enthalten in:
Journal of Materials Engineering and Performance, 19/6(2010-08-01), 900-905
Format:
Artikel (online)
ID: 44518874X