caa a22 4500 445303352 CHVBK 20180317142604.0 cr unu---uuuuu 170323e20100701xx s 000 0 eng 10.1007/s12274-010-0012-x doi (NATIONALLICENCE)springer-10.1007/s12274-010-0012-x Biomimetic corrugated silicon nanocone arrays for self-cleaning antireflection coatings [Elektronische Daten] [Yandong Wang, Nan Lu, Hongbo Xu, Gang Shi, Miaojun Xu, Xiaowen Lin, Haibo Li, Wentao Wang, Dianpeng Qi, Yanqing Lu, Lifeng Chi] Corrugated silicon nanocone (SiNC) arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings. The reflectance was reduced from above 35% to less than 0.7% in the range 400-1050 nm, and it remained below 0.5% at incidence angles up to 70° at 632.8 nm for both s- and p-polarized light. The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°. Tsinghua University Press and Springer-Verlag Berlin Heidelberg, 2010 Antireflection nationallicence silicon nancone (SiNC) arrays nationallicence reactive ion etching nationallicence nanosphere lithography nationallicence superhydrophobic nationallicence Wang Yandong State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Lu Nan State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Xu Hongbo State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Shi Gang State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Xu Miaojun State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Lin Xiaowen National Laboratory of Solid State Microstructures, Nanjing University, 210093, Nanjing, China aut Li Haibo State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Wang Wentao State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Qi Dianpeng State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Lu Yanqing National Laboratory of Solid State Microstructures, Nanjing University, 210093, Nanjing, China aut Chi Lifeng State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut Nano Research Tsinghua Press 3/7(2010-07-01), 520-527 1998-0124 3:7<520 2010 3 12274 https://doi.org/10.1007/s12274-010-0012-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s12274-010-0012-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Yandong State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Lu Nan State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Xu Hongbo State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Shi Gang State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Xu Miaojun State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Lin Xiaowen National Laboratory of Solid State Microstructures, Nanjing University, 210093, Nanjing, China aut NATIONALLICENCE 700 1- Li Haibo State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Wang Wentao State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Qi Dianpeng State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 700 1- Lu Yanqing National Laboratory of Solid State Microstructures, Nanjing University, 210093, Nanjing, China aut NATIONALLICENCE 700 1- Chi Lifeng State Key Laboratory of Supramolecular Structure and Materials, Jilin University, 130012, Changchun, China aut NATIONALLICENCE 773 0- Nano Research Tsinghua Press 3/7(2010-07-01), 520-527 1998-0124 3:7<520 2010 3 12274 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer