caa a22 4500 445360925 CHVBK 20180317142915.0 cr unu---uuuuu 170323e20110301xx s 000 0 eng 10.1007/s11071-010-9833-0 doi (NATIONALLICENCE)springer-10.1007/s11071-010-9833-0 A double microbeam MEMS ohmic switch forRF-applications with low actuation voltage [Elektronische Daten] [Hatem Samaali, Fehmi Najar, Slim Choura, Ali Nayfeh, Mohamed Masmoudi] In this paper, we propose the design of an ohmic contact RF microswitch with low voltage actuation, where the upper and lower microplates are displaceable. We develop a mathematical model for the RF microswitch made up of two electrostatically actuated microplates; each microplate is attached to the end of a microcantilever. We assume that the microbeams are flexible and that the microplates are rigid. The electrostatic force applied between the two microplates is a nonlinear function of the displacements and applied voltage. We formulate and solve the static and eigenvalue problems associated with the proposed microsystem. We also examine the dynamic behavior of the microswitch by calculating the limit-cycle solutions. We discretize the equations of motion by considering the first few dominant modes in the microsystem dynamics. We show that only two modes are sufficient to accurately simulate the response of the microsystem under DC and harmonic AC voltages. We demonstrate that the resulting static pull-in voltage and switching time are reduced by 30 and 45%, respectively, as compared to those of a single microbeam-microplate RF-microswitch. Finally, we investigate the global stability of the microswitch using different excitation conditions. Springer Science+Business Media B.V., 2010 MEMS nationallicence Microswitch nationallicence Pull-in nationallicence Pull-out nationallicence Reduced-order model nationallicence Samaali Hatem Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut Najar Fehmi Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, BP 743, 2078, La Marsa, Tunisia aut Choura Slim Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut Nayfeh Ali Department of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, 24061, Blacksburg, VA, USA aut Masmoudi Mohamed Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut Nonlinear Dynamics Springer Netherlands 63/4(2011-03-01), 719-734 0924-090X 63:4<719 2011 63 11071 https://doi.org/10.1007/s11071-010-9833-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11071-010-9833-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Samaali Hatem Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut NATIONALLICENCE 700 1- Najar Fehmi Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, BP 743, 2078, La Marsa, Tunisia aut NATIONALLICENCE 700 1- Choura Slim Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut NATIONALLICENCE 700 1- Nayfeh Ali Department of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, 24061, Blacksburg, VA, USA aut NATIONALLICENCE 700 1- Masmoudi Mohamed Micro Electro Thermal Systems Research Unit, National Engineering School of Sfax, BP 3038, Sfax, Tunisia aut NATIONALLICENCE 773 0- Nonlinear Dynamics Springer Netherlands 63/4(2011-03-01), 719-734 0924-090X 63:4<719 2011 63 11071 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer