caa a22 4500 445361654 CHVBK 20180317142917.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s11071-011-0038-y doi (NATIONALLICENCE)springer-10.1007/s11071-011-0038-y Bistability of curved microbeams actuated by fringing electrostatic fields [Elektronische Daten] [Slava Krylov, Bojan Ilic, Stella Lulinsky] In this work we investigate the feasibility of two-directional switching of an initially curved or pre-buckled electrostatically actuated microbeams using a single electrode fabricated from the same structural layer. The distributed electrostatic force, which is engendered by the asymmetry of the fringing fields in the deformed state, acts in the direction opposite to the deflection of the beam and can be effectively viewed as a reaction of a nonlinear elastic foundation with stiffness parameterized by the voltage. The reduced order model was built using the Galerkin decomposition with linear undamped modes of a straight beam as base functions and verified using the results of the numerical solution of the differential equation. The electrostatic force was approximated by means of fitting the results of three-dimensional numerical solution of the electrostatic problem. Static stability analysis reveals that the presence of the restoring electrostatic force may result in the suppression of the snap-through instability as well as in the appearance of additional stable configurations associated with higher buckling modes of the beam that are not observed in "mechanically” loaded structures. We show that two-directional switching of a pre-buckled beam between two stable configurations cannot be achieved using quasistatic loading. Furthermore, we show that switching is both associated with the dynamic snap-through mechanism and possible within certain interval of actuation voltages. Using a single-degree-of-freedom (lumped) model, estimation voltage boundaries are obtained. Theoretical results illustrate the feasibility of the suggested operational principle as an efficient mechanism in the arena of non-volatile mechanical memory devices. Springer Science+Business Media B.V., 2011 Curved microbeam nationallicence Electrostatic actuation nationallicence Snap-through buckling nationallicence MEMS/NEMS nationallicence Krylov Slava School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel aut Ilic Bojan School of Engineering and Applied Physics and Cornell Nanoscale Facility, Cornell University, 14853, Ithaca, NY, USA aut Lulinsky Stella School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel aut Nonlinear Dynamics Springer Netherlands 66/3(2011-11-01), 403-426 0924-090X 66:3<403 2011 66 11071 https://doi.org/10.1007/s11071-011-0038-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s11071-011-0038-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Krylov Slava School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel aut NATIONALLICENCE 700 1- Ilic Bojan School of Engineering and Applied Physics and Cornell Nanoscale Facility, Cornell University, 14853, Ithaca, NY, USA aut NATIONALLICENCE 700 1- Lulinsky Stella School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel aut NATIONALLICENCE 773 0- Nonlinear Dynamics Springer Netherlands 66/3(2011-11-01), 403-426 0924-090X 66:3<403 2011 66 11071 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer