caa a22 4500 445362650 CHVBK 20180317142919.0 cr unu---uuuuu 170323e20111201xx s 000 0 eng 10.1007/s10832-011-9663-6 doi (NATIONALLICENCE)springer-10.1007/s10832-011-9663-6 Residual stress analysis of all perovskite oxide cantilevers [Elektronische Daten] [Giuseppe Vasta, Timothy Jackson, Andreas Frommhold, James Bowen, Edward Tarte] We have used a method to experimentally determine the curvature of thin film multilayers in all oxide cantilevers. This method is applicable for large deflections and enables the radius of curvature of the beam, at a certain distance from the anchor, to be determined accurately. The deflections of the suspended beams are measured at different distances from the anchor point using SEM images and the expression of the deflection curve is calculated for each cantilever. With this expression it is possible to calculate the value of the radius of curvature at the free end of the cantilever. Together with measured values for the Youngs Modulus, this enabled us to determine the residual stress in each cantilever. This analysis has been applied to SrRuO 3/BaTiO 3/SrRuO 3, BaTiO 3/MgO/SrTiO 3 and BaTiO3/SrTiO3 piezoelectric cantilevers and the results compared to two models in which the stresses are determined by lattice parameter mismatch or differences in thermal expansion coefficient. Our analysis shows that the bending of the beams is mainly due the thermal stress generated during the cooling down stage subsequent to the film deposition. The Author(s), 2011 Residual stress nationallicence Thermal stress nationallicence Cantilever nationallicence Thin film stress nationallicence Vasta Giuseppe The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut Jackson Timothy The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut Frommhold Andreas The University of Birmingham, Nanoscale Physics Research Laboratory, School of Physics and Astronomy, B15 2TT, Edgbaston, Birmingham, UK aut Bowen James The University of Birmingham, School of Chemical Engineering, B15 2TT, Edgbaston, Birmingham, UK aut Tarte Edward The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut Journal of Electroceramics Springer US; http://www.springer-ny.com 27/3-4(2011-12-01), 176-188 1385-3449 27:3-4<176 2011 27 10832 https://doi.org/10.1007/s10832-011-9663-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-011-9663-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Vasta Giuseppe The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut NATIONALLICENCE 700 1- Jackson Timothy The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut NATIONALLICENCE 700 1- Frommhold Andreas The University of Birmingham, Nanoscale Physics Research Laboratory, School of Physics and Astronomy, B15 2TT, Edgbaston, Birmingham, UK aut NATIONALLICENCE 700 1- Bowen James The University of Birmingham, School of Chemical Engineering, B15 2TT, Edgbaston, Birmingham, UK aut NATIONALLICENCE 700 1- Tarte Edward The University of Birmingham, School of Electrical Electronic and Computer Engineering, 52 Pritchatts Road, B15 2TT, Edgbaston, Birmingham, UK aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 27/3-4(2011-12-01), 176-188 1385-3449 27:3-4<176 2011 27 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer