caa a22 4500 445362677 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110801xx s 000 0 eng 10.1007/s10832-011-9647-6 doi (NATIONALLICENCE)springer-10.1007/s10832-011-9647-6 Extension sensing of piezo actuators using time-domain ultrasonic measurement and frequency-domain impedance measurement [Elektronische Daten] [Erman Uzgur, Shin-Sung Kim, Emma Bryce, David Hutson, Mel Strachan, Katherine Kirk] There is a requirement for a simple and accurate extension sensing method for multilayer piezoelectric actuators for precision micro-positioning applications. This paper explains three different techniques of extension sensing for multilayer piezoelectric actuators, to provide a suitable method which involves primarily overcoming the inherent hysteretic behaviour of piezoelectric materials. The methods were; time domain ultrasonic pulse echo response for time travel of acoustic pulses, frequency shift response spectrum of an ultrasonic transducer and frequency shift in the impedance spectrum of the actuator alone. From the results, method of the frequency shift in the impedance spectrum of the actuator alone proved to be the most effective of the three. It was found that due to acoustic velocity changes under DC bias during the ultrasonic measurements, the inherent hysteretic behaviour was amplified in the other two methods when extension was plotted against time-shift and frequency shift. The results are presented and are discussed in terms of their suitability for precise positioning. Springer Science+Business Media, LLC, 2011 Extension sensing nationallicence Multilayer actuators nationallicence Self sensing nationallicence Ultrasound nationallicence Resonance spectrum nationallicence Uzgur Erman Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut Kim Shin-Sung Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut Bryce Emma Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut Hutson David Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut Strachan Mel UK Astronomy Technology Centre, Royal Observatory, Edinburgh, UK aut Kirk Katherine Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 38-44 1385-3449 27:1<38 2011 27 10832 https://doi.org/10.1007/s10832-011-9647-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-011-9647-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Uzgur Erman Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut NATIONALLICENCE 700 1- Kim Shin-Sung Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut NATIONALLICENCE 700 1- Bryce Emma Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut NATIONALLICENCE 700 1- Hutson David Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut NATIONALLICENCE 700 1- Strachan Mel UK Astronomy Technology Centre, Royal Observatory, Edinburgh, UK aut NATIONALLICENCE 700 1- Kirk Katherine Microscale Sensors, School of Engineering, University of the West of Scotland, Paisley, UK aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 38-44 1385-3449 27:1<38 2011 27 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer